TOPIC: Molecular Spectroscopy and Photochemistry.
New laser-based hybride technologies for thin layer deposition.
No. A1010110, Grant Agency of the Academy of Sciences of the Czech Republic (associated contractor - project leader is affiliated with another institution)
The development of novel and modified thin film deposition techniques, study of their possibilities and characterization of discharge plasma is very important for creation of new types of thin films, multilayers, complex and doped layers, graded coatings, waveguiding films, nanostructures, etc. The improvement of present deposition systems, and construction of new hybrid deposition techniques, is necessary. Our attention will be focused on development of systems combining pulsed laser deposition witah concentrated RF and hollow cathode discharges, and magnetron sputtering. The RF biasing and laser modification of the film surface sill be also applied to inhance density and crystallization of the growing films. Formation processes in discharge plasma will be studied by diode-laser spectroscopy, OES, Langmuir probes and CCD camera. Films will be characterized by WDX, XRD, XPS, STM, SEM, Raman spectroscopy and spectroscopic ellipsometry. Microhardness and adhesion will be also tested.
prof. Ing. ZELINGER ZdenÄ›k, CSc.
Department: Department of Spectroscopy
Phone: (+420) 26605 3046, 3085
Fax: (+420) 286582307
Room: 019, 04A